Applied Materials unveiled a 3D chip-manufacturing equipment line for AI
semiconductors advanced targeting packaging flows such as HBM (high-bandwidth
memory) stacking, chiplets and hybrid bonding. The portfolio focuses on
planarization, deposition and metrology for those processes and includes
advanced chemical-mechanical polishing (CMP), electrochemical deposition (ECD)
and plasma-enhanced chemical vapor deposition (PECVD) systems for packaging, a
new electron-beam process-control tool, and an upgraded epitaxy tool aimed at
DRAM process applications.