ASML (ASML.O) and the Netherlands Organization for Applied Scientific Research
(TNO) have agreed to jointly develop and commercialize photonic chips. The
collaboration centers on a pilot production line under construction at TNO’s
High Tech Campus in Eindhoven. ASML will provide manufacturing support in
phases, including DUV and i-line lithography equipment. On commissioning the
facility will have 6-inch wafer-scale indium phosphide (InP) photonic chip
mass-production capability.
